LP150 & LP200 Low Profile XY Stages
LP150 Low Profile XY Stage
The LP150 and LP200 are low profile XY stages in a compact envelope, making them a perfect motion platform for use in desktop inspection and metrology instruments. While compact, performance is strong. Horizontal and vertical straightness of travel is ±1.0μm/25mm and a hysteresis-free linear encoder gives positional feedback at 0.5μm.
For lower overall cost and ease of integration, the LP150 and LP200 use stepper motors with integral controllers and drivers. An internal, high-flex, long life cable loop brings power and communication to the upper axis. Serial communication with a computer is configured as a multi-drop RS422/485 system. A single connection is all that is required for closed loop, XY positioning.
|Stage Travel||150mm x 150mm||200mm x 200mm|
|Drive Type||0.050" or 0.100" Lead Screw, Anti-backlash Nut|
|Motor and Controller||IMS MDrive Plus|
|Linear Accuracy||±10.0μm (±5.0μm per 25mm)||±12.0μm (±5.0μm per 25mm)|
|Straightness of Travel||±8.0μm (±1.0μm per 25mm)|
|Flatness of Travel||±8.0μm (±1.0μm per 25mm)|
|Position Feedback||0.5μm Linear Encoder|